Applications
Materials Science, Electronic and Optical Devices, Biological Sciences, Geological Sciences, Defect and Failure Analysis, Sample preparation for other techniques
- High resolution SEM Imaging (features <10 nm)
- Large feature cross sections (>100 um)
- Polishing of delicate samples for imaging and EBSD
- FIB tomography serial sectioning for 3D reconstruction
- FIB tomography for 3D EDS reconstructions
- TEM and APT specimen preparation of Ga sensitive materials
Contact
Location
Room G021
Acknowledgments
Publications, presentations, and posters resulting from work on this instrument should state: “The authors acknowledge the financial support of the University of Michigan College of Engineering and technical support from the Michigan Center for Materials Characterization.“
Specifications
- Electron Beam Source: Schottky Field Emitter
- Ion Beam Source: Inductively coupled Xe Gas Plasma
- Accelerating Voltages
- Electrons: 350V to 30 kV (20eV minimum landing energy using Beam Deceleration)
- Ions: 2 kV to 30 kV
- Beam Currents
- Electrons: 0.8 pA – 100 nA (0.8 pA – 100 pA in UC Mode)
- Ions: 1.5 pA – 2.5 uA (in 20 steps)
- Detectors
- Electron and Ion Beam Imaging – Everhart-Thornley Detector (ETD)
- Electron and Ion Beam Imaging – Through-the-lens Detector (TLD)
- Electron and Ion Beam Imaging – Ion Conversion and Electron Detector (ICE)
- ETD, TLD, and ICE detectors can operate in Secondary and Backscatter electron modes, and custom modes for charge suppression for SEM imaging
- ICE detector can operate in both Secondary Electron and Secondary Ion modes for FIB imaging
- Internal mounted NavCam for sample navigation
- Internal mounted CCD camera to view stage and samples
- Energy Dispersive Spectroscopy (EDS) – ThermoFisher Pathfinder EDS UltraDry 30M system
- 30 mm2 detector active area
- 129 eV energy resolution at Mn k-alpha
- Norvar window sensitive to Be
- Up to 1M x-ray input CPS and 300K output CPS
- Motorized slide for detector insertion and retraction
- SEM Resolution Specifications
- <0.6 nm 2-15 keV landing energy
- <0.7 nm @ 1 keV with beam deceleration
- <1.0 nm @ 500 eV with beam deceleration
- <1.1 nm @ 250 eV with beam deceleration
- Ion Resolution
- <20 nm at 30 kV using preferred statistical method
- <10 nm at 30 kV using selective edge method
- Gas Injector
- MultiChem Gas Delivery System
- Allows up to 6 chemistries
- Supports gaseous, liquid, and solid precursors
- Flow control for each chemistry
- Heating controls for up to 6 chemistries
- Cooling available for 2 chemistries
- Currently configured with Pt and C Deposition
- MultiChem Gas Delivery System
- Micromanipulator
- ThermoFisher Easylift EX
- Controls integrated into Microscope UI
- Includes compucentric rotation capability
- <50+/-30 nm smallest step size
- <150 nm omni-directional repeatability
- ThermoFisher Easylift EX
- Included Software
- Auto Slice & View 4 – FIB serial section tomography and EDS tomography
- AutoScript 4 – Python based scripting for automated imaging and milling
- Stages
- 150 mm Stage
- X,Y, and R axis use high precision piezo motors
- X and Y travel ranges +/- 75 mm
- Z travel range 10 mm
- Rotation is +/- 360° either direction
- Tilt range -38° to +60°
- 150 mm Stage
References
- Rate Limitations in Composite Solid-State Battery Electrodes: Revealing Heterogeneity with Operando Microscopy, A.L. Davis, V. Goel, D.W. Liao, M.N. Main, E. Kazyak, J. Lee, K. Thornton, N.P. Dasgupta, ACS Energy Letters, 6, 2993-3003, 2021
- Origins of Non-Random Particle Distributions and Implications to Abnormal Grain Growth in an Al-3.5 Wt Pct Cu Alloy, N. Lu, J. Kang, A.J. Shahani, Metallurgical and Materials Transactions A, 2021
- Hierarchical Microstructures and Deformation Behavior of Laser Direct-Metal-Deposited Cu-Fe Alloys, A. Chatterjee, E. Sprague, J. Mazumder, A. Misra, Materials Science and Engineering A, 802, 140659, 2021
- A High-Speed Metal-to-Polymer Direct Joining Technique and Underlying Bonding Mechanisms, F.C. Liu, P. Dong, X. Pei, Journal of Materials Processing Technology, 280, 116610, 2020